Study of Optical Properties on Eu2O3 Thin Films Prepared by Magnetron Sputtering
碩士 === 國立成功大學 === 光電科學與工程研究所 === 95 === In this study, Eu2O3 thin films were deposited on sapphire substrates by RF-magnetron sputtering system and annealed under nitrogen atmosphere at different temperatures to change their optical properties. We also studied the effects of different chamber pressu...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/12208346071340945848 |