ZnO film with Al nano-particles to improve the light extraction efficiency of GaN based light-emitting diodes
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 95 === The research in this paper was to use transparent and conductive ZnO films with Al nano-particles (Al doped ZnO, AZO) to increase the extraction efficiency of GaN-based LEDs. The AZO films were deposited by sputtering ZnO(99.99%) and Al(99.99%) targets simul...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2007
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/45148846575236547028 |