Optical analysis and annealing effect of diamond like carbon films grown by sputtering

碩士 === 國立成功大學 === 物理學系碩博士班 === 95 === Diamond like carbon films (DLCFS) were grown by radio frequency sputtering at different sputtering power and different thickness. The DLCF sample and its annealing effect were analized by Raman spectra. Our results show that, the best DLCF was grown at 210W...

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Main Authors:	Chang-Chi Chen, 陳昌祺
Other Authors:	Shing-Long Tian
Format:	Others
Language:	zh-TW
Published:	2007
Online Access:	http://ndltd.ncl.edu.tw/handle/18522520761306336134

id	ndltd-TW-095NCKU5198002
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spelling	ndltd-TW-095NCKU51980022015-12-11T04:04:29Z http://ndltd.ncl.edu.tw/handle/18522520761306336134 Optical analysis and annealing effect of diamond like carbon films grown by sputtering 濺鍍功率與退火效應對類鑽碳膜影響之光學分析 Chang-Chi Chen 陳昌祺碩士國立成功大學物理學系碩博士班 95 Diamond like carbon films (DLCFS) were grown by radio frequency sputtering at different sputtering power and different thickness. The DLCF sample and its annealing effect were analized by Raman spectra. Our results show that, the best DLCF was grown at 210W,61.6nm. With the increasing thickness, annealing temperature and annealing time, the DLCF was graphized. Shing-Long Tian 田興龍 2007 學位論文 ; thesis 44 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立成功大學 === 物理學系碩博士班 === 95 === Diamond like carbon films (DLCFS) were grown by radio frequency sputtering at different sputtering power and different thickness. The DLCF sample and its annealing effect were analized by Raman spectra. Our results show that, the best DLCF was grown at 210W,61.6nm. With the increasing thickness, annealing temperature and annealing time, the DLCF was graphized.
author2	Shing-Long Tian
author_facet	Shing-Long Tian Chang-Chi Chen 陳昌祺
author	Chang-Chi Chen 陳昌祺
spellingShingle	Chang-Chi Chen 陳昌祺 Optical analysis and annealing effect of diamond like carbon films grown by sputtering
author_sort	Chang-Chi Chen
title	Optical analysis and annealing effect of diamond like carbon films grown by sputtering
title_short	Optical analysis and annealing effect of diamond like carbon films grown by sputtering
title_full	Optical analysis and annealing effect of diamond like carbon films grown by sputtering
title_fullStr	Optical analysis and annealing effect of diamond like carbon films grown by sputtering
title_full_unstemmed	Optical analysis and annealing effect of diamond like carbon films grown by sputtering
title_sort	optical analysis and annealing effect of diamond like carbon films grown by sputtering
publishDate	2007
url	http://ndltd.ncl.edu.tw/handle/18522520761306336134
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Optical analysis and annealing effect of diamond like carbon films grown by sputtering

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