Optical analysis and annealing effect of diamond like carbon films grown by sputtering
碩士 === 國立成功大學 === 物理學系碩博士班 === 95 === Diamond like carbon films (DLCFS) were grown by radio frequency sputtering at different sputtering power and different thickness. The DLCF sample and its annealing effect were analized by Raman spectra. Our results show that, the best DLCF was grown at 210W...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/18522520761306336134 |