Numerical Simulation of Coupled Temperature-Deformation Problem on Laser-Assisted Direct Imprinting
碩士 === 國立成功大學 === 土木工程學系碩博士班 === 95 === We developed a two-dimensional finite element model to simulate the melt of silicon substrate caused by the excimer laser, and the deformation of molten silicon due to the contact between the pre-loaded quartz mold and silicon in Laser-Assisted Direct Imprinti...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/55543475989136777914 |