Fabrication of Comb Drive Microstructures by UV-LIGA Process

• Main Authors: Chih-Cheng Fong, 馮智誠
• Other Authors: 王東安
• Format: Others
• Language: zh-TW
• Online Access: http://ndltd.ncl.edu.tw/handle/72014490677420474657

碩士 === 國立中興大學 === 精密工程學系所 === 95 === This research uses the UV-LIGA process in place of the traditional Silicon-based micromachining. We use photolithography and electrodeposition to fabricate Ni comb drive microstructures on glass substrates. The thesis also bases on this comb drive to design a kind of friction meter. Electrostatic V-beam comb drives are used to substitute for the conventional folded beam with the expectation that it will reduce the pull-in phenomenon. Two comb drives provide holding force on both sides of the movable microstructures. The study uses Matlab simulink to analyse the effects of different friction forces on the microstructures. On the fabrication aspect, taking advantage of good adhesion and selectively etching properties between Cu and Ni, we use Cu as sacrificial layer to fabricate the Ni comb drive actuator. Cr/Ti seed layer is also proposed to replace for the conventional Cr/Au seed layer. Two stages electroplating is conducted to improve the roughness of the structure surfaces.