Fabrication of Comb Drive Microstructures by UV-LIGA Process
碩士 === 國立中興大學 === 精密工程學系所 === 95 === This research uses the UV-LIGA process in place of the traditional Silicon-based micromachining. We use photolithography and electrodeposition to fabricate Ni comb drive microstructures on glass substrates. The thesis also bases on this comb drive to design a kin...
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/72014490677420474657 |