Using immersion lithography for fabricating an inclined reflective face of ridged waveguides in polymer
碩士 === 中興大學 === 精密工程學系所 === 95 === This thesis aims to develop an inclined reflective face of polymer waveguides by using Fresnel Refraction principle and measure the efficiency of light-transmitted in polymer waveguides.We using the Si substrate has 200μm thickness SiO because of its low absorbing...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/63873060369128972978 |