Fabrication methods of gray tone mask for TFT process
碩士 === 國立中興大學 === 精密工程學系所 === 95 === When thicknesses are different on chromium mask, it will result in different transmittance. As the exposure energy varies onto photo resist, it is found different photoresist remained thicknesses and profiles after development. This technique has been applied to...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/00034497086638096500 |