Fabrication and Analysis of Portable Valve-less Peristaltic Micropump
碩士 === 國立中興大學 === 精密工程學系所 === 95 === This thesis is to describe a method for fabricating a peristaltic micro-pump. First, photolithography process is used in MEMS technology to fabricate a micro-pump mold. PDMS molding and PDMS bonding method are used to fabricate a micro-channel and an actuator cha...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Online Access: | http://ndltd.ncl.edu.tw/handle/73507845093809222672 |