Study on High Performance Poly-Silicon Thin Film Transistors with Continuous-Wave Laser Crystallization
碩士 === 中興大學 === 電機工程學系所 === 95 === Recently, low temperature polycrystalline silicon thin film transistors (LTPS-TFTs) are the key devices in display applications. Although conventional top-gate LTPS -TFTs by excimer laser crystallization is an effective technology in improving the crystallinity of...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/77548870383310156245 |