Integrated FET Micro-Humidity Sensors with readout circuit
碩士 === 中興大學 === 機械工程學系所 === 95 === The MOSFET (metal oxide semiconductor field effect transistor) micro humidity sensors are manufactured by TSMC 0.35 μm CMOS(complementary metal oxide semiconductor). This study is different from the capacitive or resistant humidity sensors. The MOSFET humidity sens...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/01464235547188979116 |