Micromechanical Tunable Capacitors for RF Applications
碩士 === 國立中興大學 === 機械工程學系所 === 95 === The fabrication of micromachined tunable capacitors using the standard 0.35 μm CMOS (complementary metal oxide semiconductor) process and a post-process have been implemented. The tunable capacitors have the advantage of large tuning range. The simulated results...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/76959270192509411570 |