Fabrication and Characterization of Silicon Thin Films Using Hot-Wire CVD for Solar Cell Applications
博士 === 國立中興大學 === 材料工程學系所 === 95 === Hot-Wire Chemical Vapor Deposition (Hot-Wire CVD) is a promising technique for deposition of amorphous, microcrystalline and polycrystalline silicon thin films for photovoltaic applications. The main advantages of Hot-Wire CVD over PE-CVD, which is currently the...
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| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/71634228508292105093 |