Effect of annealing on wear-resistant and anti-bacterial properties of TaN-Cu nanocomposite thin films
碩士 === 明志科技大學 === 化工與材料工程研究所 === 95 === TaN–Cu nanocomposite films were deposited by reactive co-sputtering on Si and tool steel substrates. The films were then annealed using RTA (Rapid Thermal Annealing) at 400 C for 2、4、8 minutes respectively to induce the nucleation and growth of Cu particles i...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/97536434878051919616 |