Modeling of Wafer Die Yield by WAT Parameters
碩士 === 明志科技大學 === 工業管理研究所 === 95 === Wafer die yield is a key index of business profit at the semiconductor industry as the development of the semiconductor production technology and wafer size increases. Thus, the wafer die yield prediction models become a very important issue to this industry. Ear...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/19801027159515533428 |