Optical wave-guide prepared by ZrO2 sol-gel method
碩士 === 明新科技大學 === 電子工程研究所 === 95 === Abstract This project is to study SiO2/ZrO2/SiO2/Si wave guide deposited on Si(100) prepared by the sol–gel method. ZrO2 is an inexpensive , and wide band gap with high luminous transmittance, high refraction index, high K and hardness. ZrO2 thin films can be dep...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/17139059522564888612 |