Study of ZnO:Ga transparent conducting oxide thin films deposited on flexible substrate
碩士 === 龍華科技大學 === 工程技術研究所 === 95 === In this study, conducting and transparent gallium doped zinc oxide (ZnO:Ga；97:3 wt %, GZO) thin films have been deposited on polyethylene terephthalate (PET) substrates by radio-frequency (R.F.) magnetron sputtering. Taguchi experimental design was used to clarif...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/94425086839801932381 |