Preparation of PZT thin films for micro force sensor applications
碩士 === 國立高雄應用科技大學 === 機械與精密工程研究所 === 95 === In this study, PZT(52/48) thin films were deposited by RF magnetron sputtering on Pt/Ti/SiO2/Si substrate under different deposition power and annealing temperature. The purpose of this reserch is to obtain a full perovskite structure and smooth surface PZ...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/76199692200756173301 |