The study of polysilicon film induced by nano gold and its application on optic-electronic device
碩士 === 崑山科技大學 === 機械工程研究所 === 95 === In this thesis, nano gold particles made from different process are used in inducing anisotropic amorphous silicon ( a-Si ) thin film to crystallize polycrystalline silicon ( poly-Si ) films for application on optpelectronic device. Plasma enhanced chemical vapor...
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| Format: | Others |
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2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/40629108416691431383 |