Using microwave plasma to grow carbon nanotubes onglass substrate
碩士 === 崑山科技大學 === 電機工程研究所 === 95 === Carbon nano tube was grown on glass substrate with microwave plasma chemical vapor deposition. The purpose of using glass instead of silicon wafer as substrate is to consider applying carbon nano tube to display industry. Nickel nano film was treated into par...
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| Format: | Others |
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2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/12972267552698767797 |