Stability Analysis of Micro Electromechanical Structures
碩士 === 華梵大學 === 機電工程研究所 === 95 === This paper presents a novel and high-precision algorithm and method for stability analysis of micro electromechanical structures. The contents are extracting the Young’s modulus and residual stress of thin films through the pull-in voltage of the micro test-key at...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/96658699623675165542 |