Application of CMOS Fabrication for Prototyping Capacitive Micro-Ultrasonic Transducers
碩士 === 華梵大學 === 機電工程研究所 === 95 === The object of this thesis is to design and prototype capacitive micromachined ultrasonic transducers (CMUTs) by implementing the standard CMOS and MEMS fabrication technologies. The research of this thesis is mainly emphasized on theoretic approaches for designing...
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| Format: | Others |
| Language: | zh-TW |
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2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/23166566805528922856 |