Fatigue of coated silicon micro-cantilever beams
碩士 === 逢甲大學 === 機械工程學所 === 95 === In this thesis, the influence of Si3N4 coating on mechanical properties of single crystal silicon micro-cantilever beam fabricated on 4〞wafers by MEMS techniques is studied. A MTS micro-force testing machine (Tytron 250) with a probe is adopted for bending test, hig...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/52889979460671864790 |