Characterization of Reactively Sputtered Hydrophilic Titanium Oxide Thin Films Monitored In-Situ by Optical Emission Spectroscopy
碩士 === 逢甲大學 === 產業研發碩士班 === 95 === The research grows titanium oxide TiO and TiO2 (generally called TiOx) with ultra high vacuum reactive magnetron sputtering titanium target in different O2/Ar flow ratio, and monitors the difference of plasma type with in-situ optical emission spectroscopy (OES) t...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/09390942312117818093 |