Dopping of Sub-Nanosensitizers and Gas-Sensing Strengthening Behaviors for Sputter Deposited Tungsten Oxide Thin Films
碩士 === 逢甲大學 === 產業研發碩士班 === 95 === The research use reactive (Ar/O2) magnetron sputtering system deposit semiconductive tungsten oxide (WO3) gas-sensing thin films on single crystal silicon substrate, and then take the processing of oxygen thermally stabilized, vacuum plasma surface modification and...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/71394862724411629587 |