Design and Appications of Micro Sensor and Actuator
碩士 === 大葉大學 === 機械工程研究所碩士班 === 95 === The curnent study is divided is divided into micro sensor and actuator.the micro sensor is presented by of the fabrication of a micro humidity sensor with suspending structures.The MEMS device is developed by utilizing thin-film platinum resistors as temperature...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/44831357815954454205 |