The Optoelectronic Characteristic of Metal-Oxide-Semiconductor(MOS) Structure with Nano Oxide
碩士 === 大葉大學 === 電機工程學系 === 95 === Silicon dioxide layer with nano-particle has been spin on Si thin film for the first time. In material analysis, the field emission scanning electron microscope(FE-SEM), energy dispersion X-ray element spectrometer(EDS),and electron spectroscopy for chemical analysi...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/57649723857371378036 |