Dynamic Learning and On-line Prognostics System in PECVD Process
碩士 === 中原大學 === 機械工程研究所 === 95 === This research mainly combines artificial neural networks (ANNs) and an expert system to constitute an intelligent on-line diagnosis system that has dynamic learning function. The system is used to improve the error margin of the machine parameter which arises due t...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/28253162217681567718 |