Nano-machining and Mechanical Testing of Nano-materials inside a Scanning Electron Microscope

碩士 === 中原大學 === 機械工程研究所 === 95 === The present investigation describes about the applications of a four degrees of nano-manipulator system for three-dimensional nano-machining and nanomechanical characterization of nanoscale objects inside a scanning electron microscope (SEM). The nanomanipulation s...

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Bibliographic Details
Main Authors: Shen-Chia Li, 李伸家
Other Authors: Ming Chang
Format: Others
Language:zh-TW
Published: 2007
Online Access:http://ndltd.ncl.edu.tw/handle/61623446429056159810