The thermal-fluid simulation of cooling coils inchemical vapor deposition on epitaxy process
碩士 === 中原大學 === 機械工程研究所 === 95 === Abstract This study is focusing what the variation of cooling coils pipe pitch and deposit direction, which will affect the temperature distribution of the epitaxy produce zone for rotation dick type of MOCVD system, the cooling coils is at the bottom of the react...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/19770059619460525719 |