Investigations in Coating Control for Optical Disks
碩士 === 中原大學 === 機械工程研究所 === 95 === This paper studied the measurements and operations of EFD752V diaphragm valve. The coating control with adjustment of the diaphragm, the pressure variation of supply tank and spin coating injection time are investigated and recorded for experiment. According to the...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/93260414958048895267 |