Analysis of defect and phenomenon for TFT-LCD

碩士 === 元智大學 === 化學工程與材料科學學系 === 94 === This experiment is for the analytic method of TFT-LCD defect phenomenon mainly, for example, corrosion defect of Al gate could be analyzed by equipment parameter temperature, pH adjustment and focus ion beam. It could be improved by decreasing temperature. Then...

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Bibliographic Details
Main Authors: Mei-Yeh Wu, 吳 美 葉
Other Authors: 黃振球
Format: Others
Language:zh-TW
Online Access:http://ndltd.ncl.edu.tw/handle/05030898568244662724