Analysis of defect and phenomenon for TFT-LCD
碩士 === 元智大學 === 化學工程與材料科學學系 === 94 === This experiment is for the analytic method of TFT-LCD defect phenomenon mainly, for example, corrosion defect of Al gate could be analyzed by equipment parameter temperature, pH adjustment and focus ion beam. It could be improved by decreasing temperature. Then...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Online Access: | http://ndltd.ncl.edu.tw/handle/05030898568244662724 |