Research and Fabrication of Capacitive Linear Sensor System
碩士 === 國立雲林科技大學 === 機械工程系碩士班 === 94 === The rectangle fringe capacitive sensor system in this study was improved from the previous excellent design to hope that can be as a capacitor rule. MEMS can promote the precision and flatness that improving the stability and reproduction of the rectangular fr...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/95983728392700930968 |