Young''s Modulus and Interlaminar Fracture Toughness of Thin Film on Silicon wafer
碩士 === 國立雲林科技大學 === 機械工程系碩士班 === 94 === This study fabricated micro-cantilever beam of SU-8 photoresrist on the mirror surface or the rough surface of silicon wafer, and the techniques of MEMS fabrication are involved. In addition, bulk micro-machining techniques were applied to this experiment, and...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/91879932020590209542 |