Growth of Carbon Nanotubes on Si Substrates by Thermal Chemical Vapor Deposition
碩士 === 國立雲林科技大學 === 電子與資訊工程研究所 === 94 === In this work, the thermal evaporation and RF vacuum sputtering were used to deposit metal catalysts (Fe, Co, Ni) on the SiO2/Si substrate. Growth of carbon nanotubes (CNTs) on SiO2/Si substrates via the pyrolysis of methane by thermal CVD has also been studi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/15165072480667398832 |