DESIGN AND FABRICATION OF THE PASSIVE MICROPUMP
碩士 === 大同大學 === 機械工程學系(所) === 94 === In this study, the valveless piezoelectric micropump with nozzle and diffuser structures is to replace the micropump with traditional cantilever bean, and could avoid the efficient decreased from cantilever bean fatigue. In the fabrication process, the electropla...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/53397128030253271337 |