Analysis and research of ZnO thin films applies to Love wave liquid sensors
碩士 === 東南技術學院 === 機電整合研究所 === 94 === ZnO films with different concentrations of Mg, Ca, Sr and Ba dopants have been grown on the ST-cut quartz substrate by RF magnetron sputtering technique. The influence of different dopants on crystalline structures and surface characteristics of films were examin...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/13572413762678894895 |