Study of microscopic dynamic behaviour of a precision positioning stage driven by air lubricated capstan drive
碩士 === 淡江大學 === 機械與機電工程學系碩士班 === 94 === Increased accuracy and higher repeatability for precision positioning systems have recently been the main requests in areas such as ultra-precision machine tools and semiconductor technologies. In order to minimize the non-linear stick-slip effect in the syste...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/51010164491760963542 |