Numerical Simulation of the Contaminant Distribution Within the TFT-LCD Mini-Environment

碩士 === 國立臺北科技大學 === 冷凍空調工程系所 === 94 === From G3.5 to G7, the industries of Thin Film Transistor-Liquid Crystal Display (TFT-LCD), are all seeking the development of the products with larger size. As the size of product increases, larger processing machines and factory space are required. If the envi...

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Bibliographic Details
Main Authors: Chun-Hsien Hsiao, 蕭君賢
Other Authors: 施陽正
Format: Others
Language:zh-TW
Published: 2006
Online Access:http://ndltd.ncl.edu.tw/handle/zr2psg