Numerical Simulation of the Contaminant Distribution Within the TFT-LCD Mini-Environment
碩士 === 國立臺北科技大學 === 冷凍空調工程系所 === 94 === From G3.5 to G7, the industries of Thin Film Transistor-Liquid Crystal Display (TFT-LCD), are all seeking the development of the products with larger size. As the size of product increases, larger processing machines and factory space are required. If the envi...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2006
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Online Access: | http://ndltd.ncl.edu.tw/handle/zr2psg |