Development of The Micropipetting Error Sensor
碩士 === 國立臺北科技大學 === 冷凍空調工程系所 === 94 === The study developed an integrated MEMS flow sensor applied in detecting the volume of samples in Pipet. The microstructures of the sensor consist of a polysilicon micro heater and a thermopiles array. The centered micro heater bar encircled by temperature sens...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2006
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Online Access: | http://ndltd.ncl.edu.tw/handle/3f47fr |