Development of The Micropipetting Error Sensor

碩士 === 國立臺北科技大學 === 冷凍空調工程系所 === 94 === The study developed an integrated MEMS flow sensor applied in detecting the volume of samples in Pipet. The microstructures of the sensor consist of a polysilicon micro heater and a thermopiles array. The centered micro heater bar encircled by temperature sens...

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Bibliographic Details
Main Authors: Liang-Cheng Chang, 張良鉦
Other Authors: Dasheng Lee
Format: Others
Language:zh-TW
Published: 2006
Online Access:http://ndltd.ncl.edu.tw/handle/3f47fr