Growth and Characterization of ZnO Thin Films by Pulsed Laser Deposition
碩士 === 國立臺北科技大學 === 光電工程系所 === 94 === In this study, ZnO thin films were grown on c-plane sapphire substrates by pulsed laser deposition. The effects of the growth parameters on the film morphology, roughness, crystallinity, and optical properties were systematically investigated. An Nd:YAG Q-switch...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2006
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Online Access: | http://ndltd.ncl.edu.tw/handle/5d2p5h |