Optimization of cross-coupled ontroller parameters for nano-stage tracking motion by using the Taguchi method
碩士 === 國立虎尾科技大學 === 動力機械工程研究所 === 94 === This research uses the stage of developed in my laboratory to carry out precision positioning and tracking control. Also introduces construction of the nano-stage in detail. Tracking control is one of important techniques in the field of machine motion. Nano-...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/h6rsn8 |