Thermal stability of Zn-doped ITO films prepared by rf magnetron cosputtering system
碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 94 === Indium zinc oxide (IZO) thin films at various atomic ratios [Zn / (Zn + In) at.%] were prepared by rf cosputtering system at room temperature using indium tin oxide (ITO) and zinc oxide (ZnO) targets. The thermal stability of ITO and cosputtered films anneal...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/mn56ym |