Effects of additives and chelating agents on electroplating and etching of copper for electronic packaging.
碩士 === 國立聯合大學 === 化學工程學系碩士班 === 94 === The reaction mechanism and characterization of Cu micro-plating films with thickness of about 18 μm were studied by using different organic additives and chelating agents. The effects of electroplating process were analyzed using the linear voltammetric scannin...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2006
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Online Access: | http://ndltd.ncl.edu.tw/handle/50666475796614573559 |