Fabrication of Device by using Siliocn Nanowires
碩士 === 國立臺灣科技大學 === 電子工程系 === 93 === Nano structures and nano materials are studied widely due to the scale down to nanometer. Chemical vapor deposition（CVD） and electronic beam lithograph are often used to fabricate silicon nanowires. Chemical vapor deposition needs some poisonous and explosive gas...
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| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/44523520996558912681 |