Theoretical Study of Carbonization of CxHy Species on Si(100) and (111) Surfaces : Mechanism and Kinetics

Theoretical Study of Carbonization of CxHy Species on Si(100) and (111) Surfaces : Mechanism and Kinetics

碩士 === 國立臺灣科技大學 === 化學工程系 === 94 === Modeling of chemical vapor deposition (CVD) processes requires knowledge of the gas-flow dynamics and chemical reactrion occurring in reactor. In order to go beyond simple growth rate predictions based on the lumped kinetics from incomplete experimental kinetic d...

Full description

Bibliographic Details
Main Authors:	Jiun-Wen Cheng, 鄭鈞文
Other Authors:	Jyh-Chiang Jiang
Format:	Others
Language:	zh-TW
Published:	2006
Online Access:	http://ndltd.ncl.edu.tw/handle/hwtaj9

Similar Items

Desorption kinetics of surface species on Si(100)2X1 and Si(111)7X7 surfaces : theoretical and digital TPD studies
by: Liu, Yong
Published: (1994)

Theoretical studies of adsorption of fluorocarbons on Ag(111) surface and on Si(100) surface
by: Chou Wen-Chi, et al.
Published: (2003)

Theoretical studies of desorption of tert-Butylacetylacetate on Si(100) surface and ethanol on Pd(111) surface
by: Yung-Ting Lee, et al.
Published: (2007)

Fracture toughness degradation in HY-80 and HY-100 after prestraining
by: Mullican, James Neal
Published: (2012)

Investigations structural transitions of the cobalt on the Si(111) and Ge(111) surfaces and dicarboxylated viologens on the Cu(100) surface
by: Sung-Lin Tsay, et al.
Published: (2009)

Ab initio studies of reactions on Si(100), Ge(100) and Al(111).
Published: (2005)

Investigation of Interfacical Structures of Si3N4 on Si(100) & SI(111)
by: Mao-Lin Huang, et al.
Published: (2002)

Characterizations of Silicon Nitride and Tungsten Oxide Nanowires on Si (111) and Si (100)
by: Mo-Tung Chang, et al.

Carbonization layer grown by acetylene reaction on SI(100) and (111) surface using low pressure chemical vapor deposition
by: Hashim, Abdul manaf, et al.
Published: (2009)

Theoretical Calculations to Study Acetylene Hydrogenation Reactions on Fe(111), W(111) and Fe-W(111) Bimetallic Surfaces
by: Chun-Chih Chang, et al.
Published: (2011)

Change of electrophysical properties of the Si(111) and Si(100) surface in the process of ion implantation and next annealing
by: A.S. Rysbaev, et al.
Published: (2019-07-01)

A study of the interfacial reaction in the Au/Si(100) and Au/Si(111) systems
by: Yi-fan Lai, et al.
Published: (2002)

Reduction of residual stress and distortion in HY100 and HY130 high strength steels during welding
by: Bass, Richard Allen
Published: (2013)

Comparison of Rare Earth Refinement in 4130 and HY100
by: Robert Tuttle
Published: (2021-03-01)

Theoretical Study on the Adsorption of NO on Pt(111)、Pd(111)、Ir(111) and Rh(111) Surfaces
by: Yan-yu Chen, et al.
Published: (2009)

Theoretical study of CVD of Silane on Si(100) and Si1-xGex(100) surfaces
by: Kuo, Yu-Tzu, et al.
Published: (1999)

A theoretical study of the initial stages of oxidation of Si(111)
by: Korbei, Sebastian Harald Otto Felix
Published: (2000)

Fabrication and characterization of CuxSi1−x films on Si (111) and Si (100) by pulsed laser deposition
by: Song Zhang, et al.
Published: (2016-05-01)

Quantitative characterization of void nucleation and growth in HY-100 steels
by: Mukherjee, Sunit
Published: (2008)

Scanning Tunneling Spectroscopy of Si Magic Cluster on Si(111) Surface
by: Huang-Xian Zheng, et al.
Published: (2008)

Halocarbons on Ag(111) and Cu(111) surfaces : structure, kinetics and dynamics
by: Skegg, Michael Peter
Published: (2003)

The growth of carbon on Si(111) surface studied with Scanning Tunneling Microscopy
by: 蔣平志
Published: (2004)

Formation of PtSi on Si(111) surface
by: Che-Fu Chou, et al.
Published: (2010)

Growth and characterization of textured well-faceted ZnO on planar Si(100), planar Si(111), and textured Si(100) substrates for solar cell applications
by: Chin-Yi Tsai, et al.
Published: (2017-09-01)

Heteroepitaxial growth of GaN on (100) and (111)Si substrates by pulsed laser deposition
by: MING-CHIEN JIANG, et al.
Published: (2014)

Surface Chemistry Involved in Epitaxy of Graphene on 3C-SiC(111)/Si(111)
by: Abe Shunsuke, et al.
Published: (2010-01-01)

Scanning tunnelling microscopy of Si(111), Pb-Si(111) and Si(113)
by: Hadley, M. J.
Published: (1992)

Pb-induced Reconstructions on Si(111)-(√3×√3)/Au Surface
by: LIANG, HAO-CHUN, et al.
Published: (2016)

Kinetics of CxNy formation on electrode surface through electrochemical method
by: Chekhovskii A., et al.
Published: (2007-01-01)

Kinetics of CxNy formation on electrode surface using the electrochemical method
by: Chekhovskii A., et al.
Published: (2008-01-01)

Thermal Decomposition of Tungsten Nitride CVD Precursors on Cu(111) and Si(100) (2x1) Surfaces
by: Jin-Bao Wu, et al.
Published: (2003)

Tantalum silicides on the Si(111) surface
by: Chen,Cing-Hong, et al.
Published: (2016)

Organic Functionalization on Si(111) surface
by: Ying-Chang Lin, et al.
Published: (2005)

The structure of Au on Si(111) surface
by: ChengSan Chou, et al.
Published: (2001)

The Superstructure of BN on Si(111) Surface
by: Kai-ChengZeng, et al.
Published: (2016)

Stability of Chlorine Termination on Ge(100) and Ge(111) Surfaces
by: Sahari Siti Kudnie, et al.
Published: (2017-01-01)

Interaction of Phosphine with the Si(111)-7×7 and Ge(100)-2×1 Surfaces by Synchrotron Core-Level Photoemission
by: Tsai Hsin wen, et al.
Published: (2000)

Characterization of submerged-arc and gas-metal-arc weldments in HY-100 steel.
by: Therrien, Alfred E.
Published: (2012)

Formation of Si island on the Si(111)-(7×7)surface
by: Chen, Liang-Yu, et al.
Published: (2019)

Investigation of (111) wafers and comparison with (100) substrates
by: A Bahari
Published: (2012-06-01)