Fringe Capacitance Analysis of Micro Devices
碩士 === 國立臺灣大學 === 應用力學研究所 === 94 === This research aims at developing a general solution for calculating the capacitance of fringe field precisely. Capacitive sensing and electrostatic actuating devices are commonly used on microdevices. Therefore, determination of the capacitance is critical in the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/23046215127356719629 |