Research and development of an intelligent nano-positioning control on ultrasonic motor system
碩士 === 國立臺灣大學 === 機械工程學研究所 === 94 === The research proposed a positioning system with nano resolution. Utilize ultrasonic motor as the actuator, and develop orthogonal signal decoding method for LDGI (Laser Diffraction Grating Interferometer) as displacement feedback with high accuracy. Based on FCM...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/90942334927324376353 |