A Novel CMOS Sensor for Measuring Thermal Diffusivity of Liquids with a Transient Method
碩士 === 國立臺灣大學 === 機械工程學研究所 === 94 === The purpose of this thesis is to design a novel microdevice for measuring the thermal diffusivity of a liquid droplet in small amounts. CMOS chip is fabricated by TSMC 0.35μm 2P4M CMOS process and post-CMOS micromachining processes are proceeded. The CMOS chip c...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/40161744760089686605 |